A review of MEMS capacitive microphones
This review collates around 100 papers that developed micro-electro-mechanical system
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …
MEMS process and device
RI Laming, M Begbie, A Traynor - US Patent 7,781,249, 2010 - Google Patents
(57) ABSTRACT A MEMS device comprising a flexible membrane that is free to move in
response to pressure differences generated by sound waves. A first electrode mechanically …
response to pressure differences generated by sound waves. A first electrode mechanically …
Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate
A Torkkeli, O Rusanen, J Saarilahti, H Seppä… - Sensors and Actuators A …, 2000 - Elsevier
A capacitive single-chip silicon microphone with very low-stress polysilicon membrane was
fabricated. A mechanism for stress-releasing due to the high stress of the perforated …
fabricated. A mechanism for stress-releasing due to the high stress of the perforated …
MEMS process and device
RI Laming, M Begbie, A Traynor - US Patent 7,856,804, 2010 - Google Patents
A MEMS device comprising a flexible membrane that is free to move in response to pressure
differences generated by sound waves. A first electrode mechanically coupled to the flexible …
differences generated by sound waves. A first electrode mechanically coupled to the flexible …
Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm
In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties
of the method relies on the moveable aluminum (Al) diaphragm positioned over the …
of the method relies on the moveable aluminum (Al) diaphragm positioned over the …
Graphene membranes for Hall sensors and microphones integrated with CMOS-compatible processes
S Wittmann, C Glacer, S Wagner, S Pindl… - ACS Applied Nano …, 2019 - ACS Publications
Graphene is a promising candidate for future electronic devices because of its outstanding
electronic and mechanical properties. The high charge carrier mobility in graphene …
electronic and mechanical properties. The high charge carrier mobility in graphene …
Design and fabrication of silicon condenser microphone using corrugated diaphragm technique
Q Zou, Z Li, L Liu - Journal of microelectromechanical systems, 1996 - ieeexplore.ieee.org
A novel silicon condenser microphone with a corrugated diaphragm has been proposed,
designed, fabricated and tested. The microphone is fabricated on a single wafer by use of …
designed, fabricated and tested. The microphone is fabricated on a single wafer by use of …
Sensitivity-improved silicon condenser microphone with a novel single deeply corrugated diaphragm
A micro-machined condenser microphone, with a novel single deeply corrugated diaphragm
(SDCD) for sound sensing, has been developed to improve mechanical-sensitivity by both …
(SDCD) for sound sensing, has been developed to improve mechanical-sensitivity by both …
Development and performance analysis of a low-cost MEMS microphone-based hearing aid with three different audio amplifiers
S Mallik, D Chowdhury, M Chttopadhyay - Innovations in Systems and …, 2019 - Springer
In this paper, MEMS-based capacitive microphone and low-cost amplifier are designed for
low-cost power-efficient hearing aid application. The developed microphone along with the …
low-cost power-efficient hearing aid application. The developed microphone along with the …
A fully-integrated CMOS-MEMS audio microphone
JJ Neumann, KJ Gabriel - … . Digest of Technical Papers (Cat. No …, 2003 - ieeexplore.ieee.org
We report on the construction of a microphone and associated electronics fabricated entirely
within a standard CMOS (complementary metal oxide semiconductor) die. An A-weighted …
within a standard CMOS (complementary metal oxide semiconductor) die. An A-weighted …