A review of machine learning for the optimization of production processes

D Weichert, P Link, A Stoll, S Rüping… - … International Journal of …, 2019 - Springer
Due to the advances in the digitalization process of the manufacturing industry and the
resulting available data, there is tremendous progress and large interest in integrating …

Big data analytics in chemical engineering

L Chiang, B Lu, I Castillo - Annual review of chemical and …, 2017 - annualreviews.org
Big data analytics is the journey to turn data into insights for more informed business and
operational decisions. As the chemical engineering community is collecting more data …

A convolutional neural network for fault classification and diagnosis in semiconductor manufacturing processes

KB Lee, S Cheon, CO Kim - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
Many studies on the prediction of manufacturing results using sensor signals have been
conducted in the field of fault detection and classification (FDC) for semiconductor …

Deformable convolutional networks for efficient mixed-type wafer defect pattern recognition

J Wang, C Xu, Z Yang, J Zhang… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Defect pattern recognition (DPR) of wafer maps is critical for determining the root cause of
production defects, which can provide insights for the yield improvement in wafer foundries …

Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing

CY Hsu, WC Liu - Journal of Intelligent Manufacturing, 2021 - Springer
The development of information technology and process technology have been enhanced
the rapid changes in high-tech products and smart manufacturing, specifications become …

Data-driven approach for fault detection and diagnostic in semiconductor manufacturing

SKS Fan, CY Hsu, DM Tsai, F He… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Fault detection and classification (FDC) is important for semiconductor manufacturing to
monitor equipment's condition and examine the potential cause of the fault. Each equipment …

[HTML][HTML] A review of data mining applications in semiconductor manufacturing

P Espadinha-Cruz, R Godina, EMG Rodrigues - Processes, 2021 - mdpi.com
For decades, industrial companies have been collecting and storing high amounts of data
with the aim of better controlling and managing their processes. However, this vast amount …

Automatic root cause analysis in manufacturing: an overview & conceptualization

E e Oliveira, VL Miguéis, JL Borges - Journal of Intelligent Manufacturing, 2023 - Springer
Root cause analysis (RCA) is the process through which we find the true cause of a
problem. It is a crucial process in manufacturing, as only after finding the root cause and …

The interpretive model of manufacturing: a theoretical framework and research agenda for machine learning in manufacturing

A Sharma, Z Zhang, R Rai - International Journal of Production …, 2021 - Taylor & Francis
Manufacturing is undergoing a paradigmatic shift as it assimilates and is transformed by
machine learning and other cognitive technologies. A new paradigm usually necessitates a …

Fault detection and diagnosis using self-attentive convolutional neural networks for variable-length sensor data in semiconductor manufacturing

E Kim, S Cho, B Lee, M Cho - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
Nowadays, more attention has been placed on cost reductions and yield enhancement in
the semiconductor industry. During the manufacturing process, a considerable amount of …