Gallium nitride as an electromechanical material

M Rais-Zadeh, VJ Gokhale, A Ansari… - Journal of …, 2014 - ieeexplore.ieee.org
Gallium nitride (GaN) is a wide bandgap semiconductor material and is the most popular
material after silicon in the semiconductor industry. The prime movers behind this trend are …

Wafer-scale controlled exfoliation of metal organic vapor phase epitaxy grown InGaN/GaN multi quantum well structures using low-tack two-dimensional layered h-BN

T Ayari, S Sundaram, X Li, Y El Gmili, PL Voss… - Applied Physics …, 2016 - pubs.aip.org
Recent advances in epitaxial growth have led to the growth of III-nitride devices on 2D
layered h-BN. This advance has the potential for wafer-scale transfer to arbitrary substrates …

Evolution and prevention of meltback etching: Case study of semipolar GaN growth on patterned silicon substrates

M Khoury, O Tottereau, G Feuillet… - Journal of applied …, 2017 - pubs.aip.org
Meltback etching, a deteriorating chemical reaction occurring between gallium and silicon
under typical metal organic chemical vapor deposition growth conditions, is a common …

Control of the mechanical adhesion of III–V materials grown on layered h-BN

P Vuong, S Sundaram, A Mballo… - … Applied Materials & …, 2020 - ACS Publications
Hexagonal boron nitride (h-BN) can be used as a p-doped material in wide-bandgap
optoelectronic heterostructures or as a release layer to allow lift-off of grown three …

Microstructure and Raman scattering of Ag-doping ZnO films deposited on buffer layers

HQ Bian, SY Ma, ZM Zhang, JM Gao, HB Zhu - Journal of crystal growth, 2014 - Elsevier
Abstract Ag-doped ZnO (ZnO: Ag) films were deposited on ZnO buffer layers by radio
frequency reactive magnetron sputtering. The effect of Ag doping content on the …

GaN thin film deposition on glass and PET substrates by thermionic vacuum arc (TVA)

S Pat, Ş Korkmaz, S Özen, V Şenay - Materials Chemistry and Physics, 2015 - Elsevier
In this paper, GaN thin film production was realized by thermionic vacuum arc (TVA), a
plasma deposition technique, for the first time. We present a new deposition mechanism for …

Novel scalable transfer approach for discrete III‐nitride devices using wafer‐scale patterned H‐BN/sapphire substrate for pick‐and‐place applications

T Ayari, S Sundaram, C Bishop… - Advanced Materials …, 2019 - Wiley Online Library
The mechanical release of III‐nitride devices using h‐BN is a promising approach for
heterogeneous integration. Upscaling this technology for industrial level requires solutions …

Deposition of a Mo doped GaN thin film on glass substrate by thermionic vacuum arc (TVA)

S Özen, V Şenay, S Pat, Ş Korkmaz - Journal of Materials Science …, 2015 - Springer
Current research presents a new deposition method for GaN thin films that produces in a
very short production time for GaN-based solid-state applications. A Mo doped GaN thin film …

Wafer-scale epitaxial lift-off of optoelectronic grade GaN from a GaN substrate using a sacrificial ZnO interlayer

A Rajan, DJ Rogers, C Ton-That, L Zhu… - Journal of Physics D …, 2016 - iopscience.iop.org
Full 2 inch GaN epilayers were lifted off GaN and c-sapphire substrates by preferential
chemical dissolution of sacrificial ZnO underlayers. Modification of the standard epitaxial lift …

Fabrication of a thermostable Ga-face GaN template on a molybdenum substrate via layer transfer

Q Wang, Z Liang, Q Wang, G Zhang - Optical Materials Express, 2020 - opg.optica.org
Gallium nitride (GaN) films on high-thermal-conductivity substrates have attracted
considerable attention for their applications in high-power light-emitting diodes and …