Foundations of plasma surface functionalization of polymers for industrial and biological applications
Polymer materials are widely employed in many fields due to the ease with which they can
be formed into complex shapes, their versatile mechanical properties, light weight, and low …
be formed into complex shapes, their versatile mechanical properties, light weight, and low …
[HTML][HTML] Surface modification of PS polymer by oxygen-atom treatment from remote plasma: Initial kinetics of functional groups formation
Self-limiting surface reactions are promising for atomic layer etching of materials. Classical
treatments with plasmas do not allow for self-limiting functionalization but cause the …
treatments with plasmas do not allow for self-limiting functionalization but cause the …
Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges
The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
Low-pressure inductively coupled plasmas in hydrogen: impact of gas heating on the spatial distribution of atomic hydrogen and vibrationally excited states
Non-equilibrium inductively coupled plasmas (ICPs) operating in hydrogen are of significant
interest for applications including large-area materials processing. Increasing control of …
interest for applications including large-area materials processing. Increasing control of …
Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms
The discrete control of ion energy and flux is of increasing importance to industrially relevant
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Abstract Phase Resolved Optical Emission Spectroscopy (PROES) measurements
combined with 1d3v Particle-in-Cell/Monte Carlo Collisions simulations are performed to …
combined with 1d3v Particle-in-Cell/Monte Carlo Collisions simulations are performed to …
Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results
Phase resolved optical emission spectroscopy (PROES) measurements combined with 1d3v
particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations are used to study the electron …
particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations are used to study the electron …
Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges
Self-organized striated structure has been observed experimentally and numerically in CF 4
plasmas in radio-frequency capacitively coupled plasmas recently (Liu et al 2016 Phys. Rev …
plasmas in radio-frequency capacitively coupled plasmas recently (Liu et al 2016 Phys. Rev …
The frequency dependence of the discharge properties in a capacitively coupled oxygen discharge
JT Gudmundsson, DI Snorrason… - … Sources Science and …, 2018 - iopscience.iop.org
We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code
oopd1 to explore the evolution of the charged particle density profiles, electron heating …
oopd1 to explore the evolution of the charged particle density profiles, electron heating …
Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode
T Makabe - Journal of Physics D: Applied Physics, 2022 - iopscience.iop.org
High-frequency capacitively coupled plasmas (HF-CCPs) have been widely investigated
physically, electrically, optically, and numerically. Such research has focused on the …
physically, electrically, optically, and numerically. Such research has focused on the …