Optical metrology: from the laboratory to the real world
W Osten - Computational Optical Sensing and Imaging, 2013 - opg.optica.org
Optical metrology has shown to be a versatile tool for the solution of many inspection
problems. The main advantages of optical methods are the noncontact nature, the non …
problems. The main advantages of optical methods are the noncontact nature, the non …
A control system for automated multiscale measuring systems
J Zimmermann, O Sawodny, W Lyda, W Osten - Mechatronics, 2012 - Elsevier
Quality inspection of micro systems on wafer scale must cope with conflicting demands:
nanometer accuracy and high velocity in a comparatively large workspace. An Automated …
nanometer accuracy and high velocity in a comparatively large workspace. An Automated …
Assistant systems for efficient multiscale measurement and inspection
Optical inspection systems constitute hardware components (eg measurement sensors,
lighting systems, positioning systems etc.) and software components (system calibration …
lighting systems, positioning systems etc.) and software components (system calibration …
Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems
In this contribution the complete implementation of an automated multiscale measurement
system (AMMS) for the inspection of micro lenses and micro electromechanical systems is …
system (AMMS) for the inspection of micro lenses and micro electromechanical systems is …
Genetic programming applied to automatic algorithm design in multi-scale inspection systems
In recent years image-processing has become a central part of optical inspection and
measurement systems. Typically, after measuring the given specimen by utilizing a suitable …
measurement systems. Typically, after measuring the given specimen by utilizing a suitable …
Fourier descriptors for defect indication in a multiscale and multisensor measurement system
Efficient inspection of an object for deformations and defects requires comparison with an
existing real or simulated reference model. Fourier descriptor (FDs) based shape analysis is …
existing real or simulated reference model. Fourier descriptor (FDs) based shape analysis is …
An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS
C Gorecki, M Józwik, P Delobelle - Optical Inspection of …, 2019 - taylorfrancis.com
In this chapter, we demonstrate a low-cost and multifunctional interferometric platform based
on a Twyman–Green interferometer (TGI) for testing microelectromechanical systems …
on a Twyman–Green interferometer (TGI) for testing microelectromechanical systems …
Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS
The paper presents the electro-optical design of an interferometric inspection system for
massive parallel inspection of Micro (Opto) ElectroMechanicalSystems (M (O) EMS). The …
massive parallel inspection of Micro (Opto) ElectroMechanicalSystems (M (O) EMS). The …
Making, testing, applying: some progress in the field of micro-optics at ITO
W Osten, G Baer, M Häfner, W Lyda… - … on Optics in …, 2013 - spiedigitallibrary.org
Microoptical components play an increasing role in different technology fields such as
medical engineering, materials and information processing, imaging and metrology. But …
medical engineering, materials and information processing, imaging and metrology. But …
Finding the Needle in the Haystack-Approaches for Detecting Small Defects on a Large Object
K Gastinger, W Osten - Applied Industrial Optics: Spectroscopy …, 2013 - opg.optica.org
The inspection of small defects on large objects is a crucial part of modern production
processes. This paper gives a general overview of approaches to overcome challenges …
processes. This paper gives a general overview of approaches to overcome challenges …