The mechanical design and characterization of a micromachined on-wafer probe scalable to
submillimeter-wave frequencies is presented. The design consists of a silicon …

This paper presents a micromachined probe for on-wafer measurements of circuits in the
WR-1.0 waveguide band (0.75-1.1 THz). The probe shows a measured insertion loss of less …

An improved micromachined on-wafer probe covering frequencies 500-750 GHz is
demonstrated in this paper to address sub-millimeter-wave integrated-circuit testing …

This paper presents a comprehensive overview of the development and utilization of a
micromachined silicon-on-insulator (SOI) fabrication process that has enabled the …

We present a silicon integrated Heterostructure Barrier Varactor (HBV) frequency quintupler
(× 5) operating between 440 GHz and 490 GHz. By epitaxial transfer of InP-based HBV …

Sub-terahertz (sub-THz) vibrational spectroscopy for biosensing is based on specific
resonance features, vibrational modes or group of modes at close frequencies, in the …

This paper introduces an improved method for monitoring and controlling the contact
condition of terahertz on-wafer probes to enhance the measurement repeatability as well as …

A micromachined on-wafer probe is designed, fabricated and measured at W-Band as a
proof of concept for probes operating at sub-millimeter wavelengths. A fabrication process is …

Although progress has been made in the development of submillimeter-wave monolithic
integrated circuits, the evaluation of these circuits still relies on test fixtures, which makes …

This article presents microelectromechanical system (MEMS) ground-signal-ground (GSG)
probes based on silicon-on-insulator (SOI) technology for on-wafer microwave …