Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

In this work, the architecture, and measurements results of an ultra-low noise closed-loop
force feedback gyroscope, with superior bias instability, are presented. The MEMS is …

In this work, we propose a systematic and flexible method for designing the electronic filter of
electro-mechanical ΣΔ (EM-ΣΔ) feedbacks, widely used for the closed-loop operation of high …

High performance inertial sensors based on Micro-Electro-Mechanical Systems (MEMS)
have been progressively replacing quartz accelerometers, mechanical gyroscopes (gyros) …

High-performance electro-static gyroscopes require expensive vacuum-packaging, to
maintain the high-Q of the MEMS, and may require high actuation voltages. Piezo sensors …

In this work, a fast and cost-efficient method, to evaluate MEMS gyroscope, in a closed-loop
sense-mode operation (force-feedback), is introduced. The solution proposed in this paper …

Résumé Les gyromètres MEMS sont composés de deux modes de vibration: drive et sense.
Le fonctionnement est basé sur le transfert d'énergie entre ces modes dû à la force de …

This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …

We have performed an experimental assessment of the impact of assembly materials on
MEMS gyro thermal behavior. Very significant differences are obtained depending on the …

针对MEMS 陀螺, 基于四阶机电结合ΣΔ 调制器技术设计了一款驱动数字闭环电路.
其中电容/电压转换电路(C/V 转换电路) 采用了开关电容电路. 为了降低C/V 转换电路的噪声 …