Roadmap on ferroelectric hafnia-and zirconia-based materials and devices

JPB Silva, R Alcala, UE Avci, N Barrett, L Bégon-Lours… - APL Materials, 2023 - pubs.aip.org
Ferroelectric hafnium and zirconium oxides have undergone rapid scientific development
over the last decade, pushing them to the forefront of ultralow-power electronic systems …

Dimensional scaling of ferroelectric properties of hafnia-zirconia thin films: Electrode interface effects

F Huang, B Saini, L Wan, H Lu, X He, S Qin, W Tsai… - ACS …, 2024 - ACS Publications
Hafnia-based ferroelectric (FE) thin films are promising candidates for semiconductor
memories. However, a fundamental challenge that persists is the lack of understanding …

Enhanced Switching Reliability of Hf0.5Zr0.5O2 Ferroelectric Films Induced by Interface Engineering

F Huang, B Saini, Z Yu, C Yoo, V Thampy… - … Applied Materials & …, 2023 - ACS Publications
Ferroelectric materials have been widely researched for applications in memory and energy
storage. Among these materials and benefiting from their excellent chemical compatibility …

Nanocrystallite seeding of metastable ferroelectric phase formation in atomic layer-deposited Hafnia–Zirconia alloys

Z Yu, B Saini, Y Liu, F Huang, A Mehta… - … Applied Materials & …, 2022 - ACS Publications
Hafnia-based ferroelectric thin films are promising for semiconductor memory and
neuromorphic computing applications. Amorphous, as-deposited, thin-film binary alloys of …

First Observation of Ultra-high Polarization (~ 108 μC/cm²) in Nanometer Scaled High Performance Ferroelectric HZO Capacitors with Mo Electrodes

F Huang, B Saini, L Wan, H Lu, X He… - … IEEE Symposium on …, 2023 - ieeexplore.ieee.org
We demonstrate, for the first time, excellent ferroelectricity, and endurance of 4 nm-thick and
65~nm*45~nm size Hf 0.5 Zr 0.5 O 2 (HZO) capacitors with Mo electrodes. We show 1) the …

Grain-size adjustment in Hf0. 5Zr0. 5O2 ferroelectric film to improve the switching time in Hf0. 5Zr0. 5O2-based ferroelectric capacitor

J Yoon, Y Choi, C Shin - Nanotechnology, 2024 - iopscience.iop.org
By adjusting the rising time in annealing ferroelectric HfO 2-based films, the grain size of the
film can be controlled. In this study, we found that increasing the rising time from 10 to 30 s at …

Memory State Dynamics in BEOL FeFETs: Impact of Area Ratio on Analog Write Mechanisms and Charging

H Dahlberg, O Kaatranen, KM Persson… - IEEE …, 2025 - ieeexplore.ieee.org
This work presents dynamic state writing by combining ferroelectric (FE) polarization
together with charge injection (CI) on Si-based ferroelectric MOSFETs as a novel approach …

Variability and Reliability Study of Nano-scale Hf0.5Zr0.5O2 Ferroelectric Devices Using O3 Treatment

H Jang, A Kashir, S Oh, K Lee, L Jung… - IEEE Electron …, 2024 - ieeexplore.ieee.org
Hf0. 5Zr0. 5O2 (HZO) faces challenges related to variability and reliability due to the
instability of ferroelectric phase crystallization. This instability exacerbates reliability issues …

Realization of a composite ferroelectric characterization test system using a modified constant current method and a modified virtual ground method

DY Wang - Review of Scientific Instruments, 2024 - pubs.aip.org
ABSTRACT A composite ferroelectric characterization test system constructed using a
modified constant current method (CCM) and a modified virtual ground method (VGM) has …

Understanding of polarization reversal and charge trapping under imprint in HfO2-FeFET by charge component analysis

Y Yoshimura, K Suzuki, R Ichihara… - Japanese Journal of …, 2024 - iopscience.iop.org
Polarization reversal and charge trapping under imprint in HfO 2-based ferroelectric FET
(FeFET) are studied by charge component analysis. By decomposing the effects of …