SiOCH thin films deposited by chemical vapor deposition: From low-κ to chemical and biochemical sensors
V Jousseaume, J El Sabahy, C Yeromonahos… - Microelectronic …, 2017 - Elsevier
Significant advances have been made in the realization of porous SiOCH by chemical vapor
deposition processes. In this paper, the different approaches developed to introduce …
deposition processes. In this paper, the different approaches developed to introduce …
Understanding the VOC sorption processes on fluoro alkyl substituted phthalocyanines using ATR FT-IR spectroscopy and QCM measurements
S Harbeck, ÖF Emirik, I Gürol, AG Gürek… - Sensors and Actuators B …, 2013 - Elsevier
In this work the sorption of volatile organic compounds (VOCs) by phthalocyanines is
studied and modelled using in situ attenuated total reflection (ATR) Fourier transform …
studied and modelled using in situ attenuated total reflection (ATR) Fourier transform …
Toward optimized SiOCH films for BTEX detection: Impact of chemical composition on toluene adsorption
J El Sabahy, J Berthier, F Ricoul… - Sensors and Actuators B …, 2018 - Elsevier
Abstract Volatile Organic Compounds are a cause of concern for human health. It is
particularly the case for BTEX compounds (Benzene, Toluene, Ethylbenzene and Xylenes) …
particularly the case for BTEX compounds (Benzene, Toluene, Ethylbenzene and Xylenes) …
Effect of heat treatment on the structural and optical characteristics of plasma deposited 2-(diethylamino) ethyl methacrylate thin films by a capacitively coupled glow …
T Afroze, AH Bhuiyan - Physica Scripta, 2013 - iopscience.iop.org
This paper reports the effect of post-deposition heat treatment on the optical and structural
properties of plasma polymerized 2-(diethylamino) ethyl methacrylate (PPDEAEMA) thin …
properties of plasma polymerized 2-(diethylamino) ethyl methacrylate (PPDEAEMA) thin …
[PDF][PDF] Plasma polymerized hexamethyldisiloxane thin films for NO2 gas sensor application
In the recent past, plasma polymerization has been employed as an attractive method for
obtaining thin films. Because of the mechanism of the plasma process the structure of the …
obtaining thin films. Because of the mechanism of the plasma process the structure of the …
Porous SiOCH thin films for gravimetric gas sensors
J El Sabahy, F Ricoul, V Jousseaume - Microporous and Mesoporous …, 2022 - Elsevier
The increasing need for on-site and real-time analyses of complex gas mixtures drives the
development of several sensing approaches. In case of gravimetric sensors, a chemical …
development of several sensing approaches. In case of gravimetric sensors, a chemical …
Equipamento versátil para teste de mini-estruturas utilizadas como mini-lab.
AR Leite - 2016 - teses.usp.br
Este trabalho teve como objetivo geral a produção de um equipamento pequeno,
multifuncional, de baixo custo e útil para as áreas de engenharia química e de química …
multifuncional, de baixo custo e útil para as áreas de engenharia química e de química …
[PDF][PDF] A fine physical chemical study of plasma polymerized organosilicon thin films for VOCs BTEX selective gas sensing
G Dakroub - 2021 - theses.enscm.fr
Among the different precursors mentioned in the literature for plasma enhanced chemical
vapor deposition (PECVD), a very wide attention has been given to the organosilicon …
vapor deposition (PECVD), a very wide attention has been given to the organosilicon …
[图书][B] Quartz Crystal Microbalance Based Sensors for Detection and Discrimination of Volatile Organic Compounds Using Ionic Materials
SR Vaughan - 2019 - search.proquest.com
Volatile organic compounds (VOCs) are prevalent in everyday life, ranging from household
chemicals, naturally occurring scents from common plants and animals, to industrial-scale …
chemicals, naturally occurring scents from common plants and animals, to industrial-scale …