Controlled morphological modifications of ZnO thin films by ion irradiation

V Kondkar, D Rukade, D Kanjilal… - Materials Research …, 2017 - iopscience.iop.org
Nanocrystalline thin films of zinc oxide (ZnO) of thickness 100 nm are deposited using
electron beam (e-beam) evaporation technique. These films are irradiated using 75 MeV Au …

Spectroscopic‐ellipsometry measurement of the optical properties of zinc oxide thin films prepared by sol–gel method: coating speed effect

MM Aghgonbad, H Sedghi - Micro & Nano Letters, 2018 - Wiley Online Library
In this work, thin films of zinc oxide were prepared by sol–gel spin coating method with
different coating speeds of 3600, 4800 and 6000 rpm. Spectroscopic ellipsometry analysis …

Properties of piezoelectric layer deposited by sol-gel method for MEMS sensor applications

H Fazmir, Y Wahab, AFM Anuar, MZ Zainol… - Applied Mechanics …, 2015 - Trans Tech Publ
A layer of ZnO thin film was deposited repetitively 15 times on a silicon substrate by sol-gel
spin coating technique. The structural and electrical characteristic of the thin film was studied …