[图书][B] Metrology and Diagnostic Techniques for Nanoelectronics

Z Ma, DG Seiler - 2017 - taylorfrancis.com
Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

[HTML][HTML] In-situ X-ray tomographic imaging and controlled steering of microcracks in 3D nanopatterned structures

K Kutukova, J Gluch, M Kraatz, A Clausner, E Zschech - Materials & Design, 2022 - Elsevier
An experimental approach to control the fracture behavior of 3D nanopatterned structures in
real time and to describe the microcrack propagation in solids quantitatively is presented …

Adhesion experiments on Cu-Damascene processed interconnect structures for mode III loading

W Heyn, H Melzner, K Goller, S Ananiev… - Microelectronics …, 2023 - Elsevier
This study presents a novel approach of micromechanical interfacial testing in loading mode
III. The interfaces beneath single copper interconnect structures are investigated. The …

High-temperature interfacial adhesion strength measurement in electronic packaging using the double cantilever beam method

S Sankarasubramanian, J Cruz… - Journal of …, 2017 - asmedigitalcollection.asme.org
This paper describes the use of the double cantilever beam (DCB) method for characterizing
the adhesion strength of interfaces in advanced microelectronic packages at room and high …

Controlled fracture and mode-mixity dependence of nanoscale interconnects

H Li, M Kuhn - IEEE Transactions on Device and Materials …, 2017 - ieeexplore.ieee.org
Mechanical failures of back-end-of-line (BEoL) interconnects represent a critical yield and
reliability concern for integrating new materials such as ultralow-permittivity (ultralow-k) …

[PDF][PDF] In-situ study of crack propagation in patterned structures of microchips using X-ray microscopy

K Kutukova - 2023 - opus4.kobv.de
The motivation of this thesis was to control crack steering into regions of engineered 3D-
nanopatterned structures with high fracture toughness and to determine the local critical …

Micromechanical adhesion experiments and simulation on Cu-damascene processed test devices

W Heyn, S Ananiev, H Melzner, K Goller… - … on Device and …, 2022 - ieeexplore.ieee.org
A novel experimental setup for testing interface properties of single copper interconnect
structures is presented. The method is based on in-situ SEM nanoindentation experiments …

Modulating crack propagation in a multilayer stack with a super-layer

H Li, A Iqbal, JD Brooks - Journal of Materials Research, 2015 - cambridge.org
Quantitative characterization of interface adhesion and fracture properties of thin film
materials is of fundamental and technological interests in modern technologies. Sandwich …

Mechanical Robustness of Patterned Structures and Failure Mechanisms

E Zschech, MR Elizalde - More-than-Moore Devices and Integration for …, 2023 - Springer
The mechanical robustness of microelectronic products is a serious reliability concern,
particularly for microchips and chipsets operated in harsh environments, for use cases that …

[PDF][PDF] Low-k materials engineering for 10 nm technology node and beyond

M Krishtab, S De Gendt, R Ameloot - 2022 - lirias.kuleuven.be
The PhD research has been an integral and substantial part of my life for many years. These
were years filled with exciting experiments, thrilling ideas and hypotheses, thought …