The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …

This contribution presents charge-based capacitive self-sensing with a continuous full state
observer for a parametrically driven resonant electrostatic 1D MEMS mirror considering …

This paper proposes a dual-axis capacitive sensing design to synchronously obtain the
amplitude and phase information of the two-axis scanning angles of a two-dimensional (2D) …

In this work, a real-time capacitive sensing scheme based on electromechanical amplitude
modulation is developed to detect the scanning angle and phase of a uniaxial electrostatic …

This paper presents an analytical solution for the nonlinear dynamics of electrostatically
driven MEMS scanning mirrors. These mirrors are widely used due to their small size, low …

A novel electrothermal micromirror array integrated with thermal convection-based mirror
position sensors is proposed, in which a heater is integrated on the mirror plate to generate …

In the traditional fringe projection technique, the speed of projecting 8-bit sinusoidal fringe
patterns is slow. To address this issue, this paper designs a novel high-speed MEMS …

This paper introduces a wafer-integrated piezoresistive (PZR) sensor designed for quasi-
static micro-electro-mechanical systems (MEMS) fast steering mirrors (FSM), with the …