Atom diffusion and impurity‐induced layer disordering in quantum well III‐V semiconductor heterostructures

DG Deppe, N Holonyak Jr - Journal of applied physics, 1988 - pubs.aip.org
The process of impurity‐induced layer disordering (IILD) or layer intermixing, in Al x Ga1− x
As‐GaAs quantum well heterostructures (QWHs) and superlattices (SLs), and in related III‐V …

The physics of quantum well structures

MJ Kelly, RJ Nicholas - Reports on Progress in Physics, 1985 - iopscience.iop.org
Recently developed methods for growing epitaxial layers of semiconductors have included
the ability to exercise independent and spatial control over both the semiconductor band …

Effects of dielectric encapsulation and As overpressure on Al‐Ga interdiffusion in AlxGa1−x As‐GaAs quantum‐well heterostructures

LJ Guido, N Holonyak Jr, KC Hsieh… - Journal of applied …, 1987 - pubs.aip.org
Data are presented showing that the Al‐Ga interdiffusion coefficient (D Al‐Ga) for an Al x
Ga1− x As‐GaAs quantum‐well heterostructure, or a superlattice, is highly dependent upon …

Kinetics of silicon‐induced mixing of AlAs‐GaAs superlattices

P Mei, HW Yoon, T Venkatesan, SA Schwarz… - Applied physics …, 1987 - pubs.aip.org
The intermixing of AlAs‐GaAs superlattices has been investigated as a function of Si
concentration following anneals in the range of 500 to 900° C. The superlattice samples …

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

D Hofstetter, B Maisenholder… - IEEE Journal of Selected …, 1998 - ieeexplore.ieee.org
Various applications of quantum-well intermixing, ranging from multiwavelength lasers to
complex photonic integrated circuits, are described. The fabrication of these GaAs-AlGaAs …

Implantation disordering of AlxGa1xAs superlattices

P Gavrilovic, DG Deppe, K Meehan… - Applied physics …, 1985 - pubs.aip.org
Data are presented showing that layer disordering of Al x Ga1− x As‐GaAs quantum well
heterostructures (QWH's) or superlattices (SL's) via ion implantation can be effected with a …

Low‐threshold disorder‐defined buried‐heterostructure AlxGa1−xAs‐GaAs quantum well lasers

DG Deppe, KC Hsieh, N Holonyak Jr… - Journal of applied …, 1985 - pubs.aip.org
Two different quantum well heterostructure wafers are used to fabricate buried‐
heterostructure Al x Ga1− x As‐GaAs quantum well lasers using Si‐induced layer …

Dose‐dependent mixing of AlAs‐GaAs superlattices by Si ion implantation

T Venkatesan, SA Schwarz, DM Hwang, R Bhat… - Applied physics …, 1986 - pubs.aip.org
The effects of Si ion implantation and annealing on AlAs‐GaAs superlattices are examined
with secondary ion mass spectrometry (SIMS), Rutherford backscattering spectrometry …

Depth‐dependent native‐defect‐induced layer disordering in AlxGa1− xAs‐GaAs quantum well heterostructures

LJ Guido, N Holonyak, KC Hsieh, JE Baker - Applied physics letters, 1989 - pubs.aip.org
Photoluminescence measurements on a. nnealed single~ wen AlxGal_xAs~ GaAs quantum
wen heterostructures demonstrate that layer disordering caused by native defects is strongly …

Stripe‐geometry AlxGa1− xAs‐GaAs quantum well heterostructure lasers defined by Si diffusion and disordering

K Meehan, P Gavrilović, N Holonyak… - Applied physics …, 1985 - pubs.aip.org
The use of Si diffusion and impurity-induced layer disordering, via a Si3N4 mask pattern, to
construct stripe-geometry AI" Ga. _xAs-GaAs quantum well heterostructure lasers on n-type …