The inductively coupled plasma reactive ion etching (ICP-RIE) is a selective dry etching
method used in fabrication technology of various semiconductor devices. The etching is …

Complex fluid flow in porous media is ubiquitous in many natural and industrial processes.
Direct visualization of the fluid structure and flow dynamics is critical for understanding and …

Herein a numerical analysis is performed to explore the conversion efficiency of mode
converters for a plasmonic waveguide (WG). The major concern of metal-insulator-metal …

The photonic resonances hosted by nanostructures provide vivid colors that can be used as
color filters instead of organic colors and pigments in photodetectors and printing …

Designed for science and engineering students, this text focuses on emerging trends in
processes for fabricating MEMS and NEMS devices. The book reviews different forms of …

Recently, microreactor technology has received a great deal of attention. However, most of
the research carried out in this field is concerned with engineering aspects of microreactors …

The surface wrinkling of biological tissues is ubiquitous in nature. Accumulating evidence
suggests that the mechanical force plays a significant role in shaping the biological …

A growing number of microsystem technology (MST) applications, particularly in the field of
microfluidics with its applications in the life sciences, have a need for novel fabrication …

Silicon is the undisputed leader for microelectronics among all the industrial materials and
Si nanostructures flourish as natural candidates for tomorrow's technologies due to the rising …

We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance
frequency and high power density. A spiral shaped microelectromechanical system (MEMS) …