MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Designed for science and engineering students, this text focuses on emerging trends in
processes for fabricating MEMS and NEMS devices. The book reviews different forms of …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …

Microtransducers are miniaturized signal-conversion devices realized using techniques
established in the integrated circuit (IC) industry coupled with application-specific thin film …

Piezoresistive pressure sensors on the basis of semiconductor microcrystals and laser
recrystallized SOI layers have been developed. Design examples of the sensors and some …

Application of microzone laser recrystallization in the technology of microelectronic
mechanical sensors is considered. Recent results concerning theoretical and experimental …

The electrical properties of both n-type and p-type polycrystalline silicon (polysilicon) films
for sensor applications have been characterized, together with the basic electrical …

The physical aspects of multifunctional sensors which are based on the influence of strain
on all the kinetic effects in semiconductors (resistivity, Seebeck effect, thermal conductivity …

A novel metal-induced lateral crystallization (MILC) technology has been applied to the
formation of improved polycrystalline silicon (poly-Si) piezo-resistors. Nickel has been used …

The measurements of the magnetoresistance for p-type poly-Si with concentration 2.4× 10
18 cm− 3 were carried out in the low temperature range 4.2–20 K and in the magnetic field …