[HTML][HTML] β-Ga2O3 material properties, growth technologies, and devices: a review

M Higashiwaki - AAPPS Bulletin, 2022 - Springer
Rapid progress in β-gallium oxide (β-Ga 2 O 3) material and device technologies has been
made in this decade, and its superior material properties based on the very large bandgap …

[HTML][HTML] β-Gallium oxide power electronics

AJ Green, J Speck, G Xing, P Moens, F Allerstam… - Apl Materials, 2022 - pubs.aip.org
Gallium Oxide has undergone rapid technological maturation over the last decade, pushing
it to the forefront of ultra-wide band gap semiconductor technologies. Maximizing the …

β‐Gallium Oxide Devices: Progress and Outlook

M Higashiwaki - physica status solidi (RRL)–Rapid Research …, 2021 - Wiley Online Library
Beta‐gallium oxide (β-Ga 2 O 3) has a history of research and development for over 70
years; however, it has attracted little attention as a semiconductor material for a long time …

[HTML][HTML] Phase transformation in MOCVD growth of (AlxGa1− x) 2O3 thin films

AFM Bhuiyan, Z Feng, JM Johnson, HL Huang… - APL Materials, 2020 - pubs.aip.org
This paper investigated the growth of (Al x Ga 1− x) 2 O 3 thin films on semi-insulating (010)
Ga 2 O 3 substrates over the entire Al composition range (0%< x≤ 100%) via metalorganic …

MOCVD Epitaxy of Ultrawide Bandgap β-(AlxGa1–x)2O3 with High-Al Composition on (100) β-Ga2O3 Substrates

AFM Anhar Uddin Bhuiyan, Z Feng… - Crystal Growth & …, 2020 - ACS Publications
Single β-phase (100)(Al x Ga1–x) 2O3 thin films were successfully grown on (100) oriented
β-Ga2O3 substrates via metalorganic chemical vapor deposition (MOCVD). By …

[HTML][HTML] First-principles surface energies for monoclinic Ga2O3 and Al2O3 and consequences for cracking of (AlxGa1− x) 2O3

S Mu, M Wang, H Peelaers, CG Van de Walle - APL Materials, 2020 - pubs.aip.org
Crack formation limits the growth of (Al x Ga 1− x) 2 O 3 epitaxial films on Ga 2 O 3
substrates. We employ first-principles calculations to determine the brittle fracture toughness …

Crystal orientation dictated epitaxy of ultrawide-bandgap 5.4- to 8.6-eV α-(AlGa)2O3 on m-plane sapphire

R Jinno, CS Chang, T Onuma, Y Cho, ST Ho… - Science …, 2021 - science.org
Ultrawide-bandgap semiconductors are ushering in the next generation of high-power
electronics. The correct crystal orientation can make or break successful epitaxy of such …

[HTML][HTML] Sn doping of (010) β-Ga2O3 films grown by plasma-assisted molecular beam epitaxy

A Mauze, Y Zhang, T Itoh, E Ahmadi… - Applied Physics …, 2020 - pubs.aip.org
Sn doping of (010) β-Ga 2 O 3 grown by conventional plasma-assisted molecular beam
epitaxy (PAMBE) and via metal oxide catalyzed epitaxy (MOCATAXY) using a supplied …

Bandgap engineering of Gallium oxides by crystalline disorder

Y Chen, Y Lu, X Yang, S Li, K Li, X Chen, Z Xu… - Materials Today …, 2021 - Elsevier
Abstract Gallium oxide (Ga 2 O 3) has recently emerged as a promising candidate for
applications in high-power and radio frequency electronics, deep-ultraviolet optoelectronics …

[HTML][HTML] Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1− x) 2O3 thin films on m-plane sapphire substrates

AFM Bhuiyan, Z Feng, HL Huang, L Meng, J Hwang… - APL Materials, 2021 - pubs.aip.org
Single α-phase (Al x Ga 1− x) 2 O 3 thin films are grown on m-plane sapphire (α-Al 2 O 3)
substrates via metalorganic chemical vapor deposition. By systematically tuning the growth …