A review of various calibration techniques of MEMS inertial sensors is presented in this
paper. MEMS inertial sensors are subject to various sources of error, so it is essential to …

MEMS-IMUs 1 are cost-effective, self-contained, small-size, low-power devices used in
various motion tracking and sensing applications. The triaxial gyroscope and accelerometer …

Micro-electromechanical systems (MEMS) technology-based sensors have found diverse
fields of application due to the advancement in semiconductor manufacturing technology …

The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal
and long-term drifts, imprecise factory calibration, and aging phenomena. In order to reduce …

Maintenance of mechanical elements is considered to be the most crucial task in industry
and a® ects the economics, predominantly. There are many techniques available for fault …

Micro-electro-mechanical system (MEMS) accelerometers have great potentials for
applications in aerospace, autonomous driving and consumer electronics. However, their …

Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when
subjected to changes in temperature. To improve their performance in applications with …

The reduction of temperature effect is vitally important for high precision sensors. This paper
introduces the theoretical analysis and experimental verification of an in-situ compensation …

Accelerometers provide an opportunity to expand standing balance assessments outside of
the laboratory. The purpose of this narrative review is to show that accelerometers are …

A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer
fabricated by surface micromachining, with a structure enabling precise auto-calibration …