Micromachined fluid inertial sensors
S Liu, R Zhu - Sensors, 2017 - mdpi.com
Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
From sensor networks to internet of things. Bluetooth low energy, a standard for this evolution
Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …
requirements of the Internet of Things, where cutting-edge applications will appear. These …
Damage assessment of reinforced concrete beams using cost-effective MEMS accelerometers
Acquisition of vibration data using off-the-shelf equipment is a costly procedure, thus
constraining the research and development in developing countries. In this research, micro …
constraining the research and development in developing countries. In this research, micro …
Study of the efficiency of microcantilevers: Cases of electrothermal and electromagnetic actuation
B Pruchnik, T Piasecki, K Orłowska… - Journal of …, 2022 - ieeexplore.ieee.org
In following paper we propose method of energetic description for active microcantilevers.
Microelectromechanical devices (MEMS), to which the microcantilevers belong, are …
Microelectromechanical devices (MEMS), to which the microcantilevers belong, are …
Theoretical modeling, numerical simulations and experimental study of micro thermal convective accelerometers
We present a one-dimensional (1D) theoretical model for the design analysis of a micro
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …
Stationary convective regimes in a thin vertical layer under the local heating from below
A Kondrashov, E Burkova - International Journal of Heat and Mass Transfer, 2018 - Elsevier
Numerical and experimental results obtained for the steady-state flow in a thin vertical liquid
layer heated locally from below are discussed. Based on these results, two laminar regimes …
layer heated locally from below are discussed. Based on these results, two laminar regimes …
A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization
Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity.
Working principle of these sensors is well known and first MEMS implementations were …
Working principle of these sensors is well known and first MEMS implementations were …
Enhanced 3-axis sensitivity of a CMOS MEMS convective accelerometer using a new power efficient heater structure
In this paper, a new 3-axis micromachined convective accelerometer is designed using
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …
Development of an accurate heat conduction model for micromachined convective accelerometers
This paper presents detailed development of a heat conduction model adapted for
micromachined convective accelerometers. Fitting expressions obtained from FEM data are …
micromachined convective accelerometers. Fitting expressions obtained from FEM data are …
Accelerometer
Accelerometers are among the legacy sensors impacted by the development of silicon
micromachining techniques. With pressure sensors, they were the first devices using this …
micromachining techniques. With pressure sensors, they were the first devices using this …