Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Laser interference lithography is an attractive method for the fabrication of a large-area two-
dimensional planar scale grating, which can be employed as a scale for multi-axis optical …

Periodic microscale array structures play an important role in diverse applications involving
photonic crystals and diffraction gratings. A polarized holographic lithography system is …

In dimensional metrology it is necessary to carry out multi-axis angle and displacement
measurement for high-precision positioning. Although the state-of-the-art linear …

The unique diffractive properties of gratings have made them essential in a wide range of
applications, including spectral analysis, precision measurement, optical data storage, laser …

This work presents the design, simulation, control and experimental result of an optical
scanning laser sensor for 3D imaging. The system design satisfies the Scheimpflug …

A two-axis Lloyd's mirrors interferometer based optical fabrication system was theoretically
investigated and constructed for patterning high-uniformity nanoscale crossed grating …

In this paper, an orthogonal type two-axis Lloyd's mirror interference lithography technique
was employed to fabricate two-dimensional planar scale gratings for surface encoder …

We present a method for the fabrication of an arrayed one-axis scale grating for a two-probe
optical linear encoder using a dual-beam interference lithography (IL) system with a …

A compact and stable two-axis Lloyd's mirror interferometer based on a new non-orthogonal
type of mirror-substrate assembly is designed for fabrication of 100 mm× 100 mm large-area …