Fully CMOS-compatible, highly suspended spiral inductors have been designed and
fabricated on standard silicon substrates (1/spl sim/30/spl Omega//spl middot/cm in …

A surface-micromachined, multilayer, embedded conductor fabrication process is presented.
The process is based on high-aspect-ratio MEMS via formation and subsequent …

As a viable technological option to address today's strong demands for high-performance
monolithic low-cost passive components in RF and microwave integrated circuits (ICs), a …

We present a method for the fabrication of vertical inductors for radio-frequency and
microwave applications. This process uses five levels of lithography and electroplating, with …

In this work, we report the design of 2.5 GHz integrated power amplifier based on a
graphene FET fabricated with thermal deposition on SiC. In this first large signal study of …

The recent development of micro-fabrication technologies has provided new methods for
researchers to design and fabricate micro metal coils, which will allow the coils to be …

Most of the MEMS relays reported in the field now are based on silicon fabrication and
cannot be used for power applications. In this paper, we report a research effort to …

Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and
away from ground planes and semiconducting substrates. This paper presents a …

The low oxide breakdown voltage of CMOS power transistor and low power-added
efficiency (PAE) at low power levels have been major challenging issues in the …

In this paper, a physical model is presented to predict the frequency-dependent
characteristics of solenoid-type inductors on standard silicon substrates. The model …