Nanomolding usually refers to a top-down fabrication method by which a formable or
moldable material is shaped using a mold of nanoscale dimensions. Nanomolding is the …

This review provides a survey of lithography techniques and the resist materials employed
with these techniques. The first part focuses on the conventional lithography methods used …

Using different imprint systems and process conditions, the impact of the visco-elastic
properties of polymers on the fidelity of pattern transfer in hot embossing lithography has …

Grinding, thinning, beveling, and polishing are the first steps to shaping and structuring a
material. At first sight, these methods appear to be simple. However, some materials would …

We report on a simple and versatile way for the modification of surfaces with thin polymer
films through the thermally induced generation of surface-attached polymer networks. The …

Nanoimprint lithography (NIL) is an emerging high-resolution parallel patterning method,
mainly aimed towards fields in which electron-beam and high-end photolithography are …

Polymer selection and critical dimension control across the wafer are key parameters for the
nanoimprint lithography technique. This nanotechnology requires polymers having a low …

Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon
microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy …

Hot embossing is an effective technique that structures high-precision micro-patterns of thin
polymer films, such as most thermoplastic polymers, using a hard master for optical …

Industrially efficient lithography process requires high throughput production, wafer scale
patterning capable of handling wafers up to 8 inches. Nanoimprint lithography is a new …