As the size of electronic devices continues to shrink, characterization methods capable of
precisely probing localized properties become increasingly important. Scanning probe …

This paper gives an overview of established methods and new developments in the field of
Scanning Probe Microscopy (SPM) of functional films and semiconductor devices. It focuses …

Conductive atomic force microscopy (CAFM) is a powerful technique to investigate electrical
and mechanical properties of materials and devices at the nanoscale. However, its main …

We compared nanoindentation and nanoscratch testing of 10 and 50nm thick tetrahedral
amorphous carbon (ta-C) and hydrogenated amorphous carbon (aC: H). Raman …

Diamond-like carbon (DLC) films have many excellent properties such as high hardness,
low friction coefficient, chemical inertness, and biocompatibility. Their good biocompatibility …

In this work, we extracted the film's hardness (HF) of ultra-thin diamond-like carbon layers by
simultaneously taking into account the tip blunting and the substrate effect. As compared to …

The effects of thermal stress resulting from thermal cooling for diamond like carbon (DLC)
films on a rough surface are investigated by a finite element analysis. Two different …

In this study, diamond-like carbon (DLC) films were deposited on silicon substrates using
different hydrogen and acetylene mixing ratios with the same total flow rate by RF plasma …

Scanning probe microscopy (SPM) refers to a family of techniques that have become
essential to study many different properties of materials and devices at the nanoscale. All of …

We review the implementation of X-ray reflection (reflectivity and scattering) techniques for
the study of amorphous Carbon (aC, aC: H, ta-C) thin and multilayer films and in particular in …