This review presents possible strategies to increase the operational frequency range of
vibration-based micro-generators. Most vibration-based micro-generators are spring-mass …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …

Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …

This paper presents the fabrication, characterization and modeling of a wideband MEMS
electrostatic energy harvester utilizing nonlinear springs. The experimental results show that …

Further advancement of ambient mechanical vibration energy harvesting depends on
finding a simple yet efficient method of tuning the resonance frequency of the harvester to …

The unique negative thermal expansion coefficient and remarkable thermal stability of
graphene make it an ideal candidate for nanoelectromechanical systems (NEMS) with …

In this study, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator is successfully
demonstrated that uses lead zirconate titanate (PZT) thin-film piezoelectric layer deposited …