[HTML][HTML] Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias
Atomic layer etching (ALE), a cyclic process of surface modification and removal of the
modified layer, is an emerging damage-less etching technology for semiconductor …
modified layer, is an emerging damage-less etching technology for semiconductor …
[PDF][PDF] Brief review of electron collision studies of molecules relevant to plasma
D Gupta - Appl. Sci. Converg. Technol, 2020 - researchgate.net
ABSTRACT A brief review of the electron collision studies of perfluorocarbons and SF6
relevant to plasma is presented. The use of these gases in various applications of plasma is …
relevant to plasma is presented. The use of these gases in various applications of plasma is …
Electron impact elastic and excitation cross-sections of the isomers of C4F6 molecule for plasma modeling
We report the calculations of elastic (along with its symmetry components) and electronic
excitation cross sections by electron impact of the three isomers of C 4 F 6, namely …
excitation cross sections by electron impact of the three isomers of C 4 F 6, namely …
A comparative study of electron-impact cross sections of C4F6 isomers from 15 to 5000 eV
A Bharadvaja, S Kaur, KL Baluja - Physics of Plasmas, 2019 - pubs.aip.org
Electron-impact differential, integral, and momentum transfer cross sections (CS) are
computed for C 4 F 6 isomers from 15 to 5000 eV by employing the Single Center Expansion …
computed for C 4 F 6 isomers from 15 to 5000 eV by employing the Single Center Expansion …
Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C₄F₆-Mixture-Based Inductively Coupled Plasma Characteristics
Among the next-generation semiconductor manufacturing processes, plasma-assisted
atomic layer etching (ALE) has garnered significant attention along with an increase in …
atomic layer etching (ALE) has garnered significant attention along with an increase in …
Plasma Surface Modification of Polymers for Biomedical Uses
PL Thi, M Myoung-Woon - Plasma Modification of Polyolefins: Synthesis …, 2022 - Springer
Polyolefins (POs) are a class of synthetic polymers that appear most popularly in daily uses.
Despite the natural hdydrophobic characteristic of these materials, the applications of them …
Despite the natural hdydrophobic characteristic of these materials, the applications of them …