MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on
mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have …

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a
custom-designed single-stage zero-phase-shift sustaining amplifier together with planar …

Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …

This work, the second of two parts, reports on the implementation and characterization of
high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The …

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A
detailed analysis of noise mixing mechanisms in the resonator is presented, and the …

This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-
MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical …

This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a
quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of …