In this review, we present the recent progress on film metrology focused on the advanced
and novel technologies during the last two decades. This review consists of various …

This review paper is devoted to optics of inhomogeneous thin films exhibiting defects
consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and …

Historically, spectroscopic techniques have been essential for studying the optical properties
of thin solid films. However, existing formulae for both normal transmission and reflection …

In this paper the complete optical characterization of an inhomogeneous polymer-like thin
film of SiO x C y H z exhibiting a thickness non-uniformity and transition layer at the …

The optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin
films with correlated, differently rough boundaries is essential in optimizing their …

Two samples of silicon-single crystal substrates with randomly rough surfaces covered by
native oxide layers are investigated by means of angle-resolved scattering, spectroscopic …

A method for analysis of thin film thickness in spectroscopic reflectometry is proposed. In
spectroscopic reflectometry, there has been a trade-off between accuracy and computation …

This research introduces a novel method of ensuring more reliable measurement of thin film
thickness in spectroscopic reflectometer. Nonlinear fitting is the method most commonly …

In this paper, volumetric thin film thickness is measured using the spectroscopic imaging
reflectometer, which consists of a microscopy optic system, variable bandpass filter and …

In this study, an optical investigation in a wide spectral range of polymer-like (SiO x C y H z)
thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented …