The sintering process of the MoOx target has an impact on the quality of the sputtered film. In this study, powders of MoO3 (78 wt%) and MoO2 (22 wt%) were milled and hot-pressed to …
X Zhou, H Xiong, J Xu - Coatings (Basel), 2022 - go.gale.com
The sintering process of the MoO x target has an impact on the quality of the sputtered film. In this study, powders of MoO 3 (78 wt%) and MoO 2 (22 wt%) were milled and hot-pressed …