Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

We demonstrate DNA translocations through silicon nitride pores formed by simple chemical
etching on glass substrates using microscopic amounts of hydrofluoric acid. DNA …

Currently, the technology of microelectromechanical systems is widely used in the
development of high-frequency and ultrahigh-frequency devices. The most important …

This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …

The drag of fluid flow at the solid–liquid interface in the micro/nanoscale is an important
issue in micro/nanofluidic systems. Drag depends on the surface wetting, nanobubbles …

Silicon nitride (SiN x) thin films, owing to their high hardness and great insulation
performance, show a great prospect for application in smart temperature-measurement …

The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

Polymers are ever more widely and more prominently used in microelectromechanical
systems. They provide significant added value to the existing silicon-based technologies …