Solid films are usually metastable or unstable in the as-deposited state, and they will dewet
or agglomerate to form islands when heated to sufficiently high temperatures. This process …

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …

In situ temperature monitoring of curved high-temperature components in extreme
environments is challenging for a variety of applications in fields such as aero engines and …

Microsystems are increasingly being applied in harsh and/or inaccessible environments, but
many markets expect the same level of functionality for long periods of time. Harsh …

Platinum (Pt) thin-film resistance temperature detector was fabricated on the flexible
Hastelloy tapes using magnetron sputtering and MEMS processes. NiCrAlY buffer layer and …

Abstract An~ 6.5 nm pure ZrO 2 thin film with a giant ferroelectric remanent polarization (P r)
of~ 50 μ Ccm− 2 and an effective piezoelectric coefficient (d 33) of 7− 9 pm/V is reported …

Surface acoustic wave (SAW) sensors enhanced by a graphenic sensitive layer offer
improved electrical response uniformity, and recent research has explored their potential for …

We studied the initial stages of solid-state dewetting of thin nanocrystalline Au films
deposited on sapphire substrates during annealing in air and in the flow of forming gas. The …

Low-dimensional materials are bringing significant innovations to in situ TEM
characterization. Here a new graphene microheater chip for TEM was developed by …

The integration of a flexible temperature sensor with a soft microactuator (a pneumatic
balloon actuator) for a functional microfinger is presented herein. A sensor integrated with a …