D Gregušová, P Eliáš, Z Oszi, R Kúdela, J Šoltýs… - Microelectronics …, 2006 - Elsevier
Symmetrical four-sided∼ 12-μm-high pyramids with 30°-tilted sides were revealed by the
etching of semi-insulating (100) GaAs substrates in 1H3PO4:× H2O2: 8H2O at∼ 25° C via …