Scanning micromirror platform based on MEMS technology for medical application

E Pengwang, K Rabenorosoa, M Rakotondrabe… - Micromachines, 2016 - mdpi.com
This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

MEMS‐Based Endoscopic Optical Coherence Tomography

J Sun, H Xie - International Journal of Optics, 2011 - Wiley Online Library
Early cancer detection has been playing an important role in reducing cancer mortality.
Optical coherence tomography (OCT), due to its micron‐scale resolution, has the ability to …

Analysis, simulation and relative performances of two kinds of serpentine springs

G Barillaro, A Molfese, A Nannini… - … of Micromechanics and …, 2005 - iopscience.iop.org
A complete set of approximate, closed-form expressions, obtained with small displacements
theory, for the spring constants of two kinds of serpentine springs (classic and rotated) is …

Destructive reliability analysis of electromagnetic MEMS micromirror under vibration environment

XY Fang, XY Li, KM Hu, G Yan, JH Wu… - IEEE Journal of …, 2021 - ieeexplore.ieee.org
Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …

A fast, large-stroke electrothermal MEMS mirror based on Cu/W bimorph

X Zhang, L Zhou, H Xie - Micromachines, 2015 - mdpi.com
This paper reports a large-range electrothermal bimorph microelectromechanical systems
(MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three …

Dynamic modeling and anti-disturbing control of an electromagnetic MEMS torsional micromirror considering external vibrations in vehicular LiDAR

Y Hua, S Wang, B Li, G Bai, P Zhang - Micromachines, 2021 - mdpi.com
Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely
employed in different areas, such as optical switching and medical scan imaging. As the key …

Fabrication of optical micro scanner driven by PZT actuators

T Kobayashi, J Tsaur, R Maeda - Japanese journal of applied …, 2005 - iopscience.iop.org
We have designed, simulated, fabricated and tested microelectromechanical system
(MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric …

Design, fabrication, and characteristics of a MEMS micromirror with sidewall electrodes

Y Bai, JTW Yeow, BC Wilson - Journal of …, 2010 - ieeexplore.ieee.org
This paper presents a 2-DOF silicon-on-insulator (SOI) microelectromechanical systems
(MEMS) mirror with sidewall (SW) electrodes. The biaxial MEMS mirror with SW is actuated …

A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application

XY Fang, EQ Tu, JF Zhou, A Li… - Journal of …, 2024 - ieeexplore.ieee.org
Light Detection and Ranging (LiDAR) devices are critical for constructing three-dimensional
scenes around vehicles, making them essential for automatic and intelligent driving systems …

Fabrication of three-dimensional magnetic microdevices with embedded microcoils for magnetic potential concentration

Q Ramadan, VD Samper, DP Puiu… - Journal of …, 2006 - ieeexplore.ieee.org
Novel magnetic microdevices were developed for magnetic field generation and
concentration and successfully characterized and tested for magnetic potential focusing …