Varifocal MEMS mirrors for high-speed axial focus scanning: a review

J Pribošek, M Bainschab, T Sasaki - Microsystems & Nanoengineering, 2023 - nature.com
Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Electrostatic bellow muscle actuators and energy harvesters that stack up

ID Sîrbu, G Moretti, G Bortolotti, M Bolignari, S Dirè… - Science Robotics, 2021 - science.org
Future robotic systems will be pervasive technologies operating autonomously in unknown
spaces that are shared with humans. Such complex interactions make it compulsory for them …

Integrated optofluidic iris

P Muller, R Feuerstein, H Zappe - Journal of …, 2012 - ieeexplore.ieee.org
An optofluidic iris, which uses the absorption of an opaque liquid in combination with a
second transparent liquid for defining optical apertures of variable diameters, tuned by …

Toward robotic sensor webs: Algorithms, systems, and experiments

H Chung, S Oh, DH Shim, SS Sastry - Proceedings of the IEEE, 2011 - ieeexplore.ieee.org
This paper presents recent advances in multiagent sensing and operation in dynamic
environments. Technology trends point towards a fusion of wireless sensor networks with …

Micro-hydraulic structure for high performance bio-mimetic air flow sensor arrays

MM Sadeghi, RL Peterson… - 2011 International Electron …, 2011 - ieeexplore.ieee.org
Here we introduce a novel micro-hydraulic structure that can significantly improve
performance of many MEMS devices. Using this structure we fabricate and test a new type of …

[HTML][HTML] Design and modeling of an electro-hydraulic buoyancy adjustment actuator

X Cao, W Zou, J Zhuo, D Ruan, Y Xu, F Zhou, X Yang… - AIP Advances, 2023 - pubs.aip.org
A lightweight, simple-structured, and fast-response buoyancy adjustment actuator is
essential for underwater vehicles. This article presents the design of an electro-hydraulic …

Biologically inspired, haltere, angular-rate sensors for micro-autonomous systems

GL Smith, SS Bedair, BE Schuster… - … and Applications IV, 2012 - spiedigitallibrary.org
Small autonomous aerial systems require the ability to detect roll, pitch, and yaw to enable
stable flight. Existing inertial measurement units (IMUs) are incapable of accurately …

Electrostatic micro-hydraulic systems

MM Sadeghi, HS Kim, RLB Peterson… - Journal of …, 2016 - ieeexplore.ieee.org
MEMS micro-hydraulic structures for amplification of force or deflection are introduced.
These structures are integrated with capacitances to form electrostatic micro-hydraulic …

An implantable X-ray-based blood pressure microsensor for coronary in-stent restenosis surveillance and prevention

MN Gulari, M Ghannad-Rezaie… - Journal of …, 2014 - ieeexplore.ieee.org
Coronary artery disease is a leading cause of mortality in the US and percutaneous
coronary intervention with stent placement is a common treatment. Stents often fail through …

Active pinscreen: Exploring spatio-temporal tactile feedbackfor multi-finger interaction

C Zhang, DR Sahoo, J Pearson, S Robinson… - … Conference on Human …, 2020 - dl.acm.org
Multiple fingers are often used for efficient interaction with handheld computing devices.
Currently, any tactile feedback provided is felt on the finger pad or the palm with coarse …