Plasmonic nanolithography: a review

Z Xie, W Yu, T Wang, H Zhang, Y Fu, H Liu, F Li, Z Lu… - Plasmonics, 2011 - Springer
Surface plasmon polaritons (SPPs) has attracted great attention in the last decade and
recently it has been successfully applied to nanolithography due to its ability of beyond …

Plasmonic lithography: recent progress

F Hong, R Blaikie - Advanced Optical Materials, 2019 - Wiley Online Library
Plasmonic lithography has received extensive attention as both a potential candidate for
next generation lithography and as an interesting testbed to test the fundamental resolution …

Optical performance and metallic absorption in nanoplasmonic systems

MD Arnold, MG Blaber - Optics express, 2009 - opg.optica.org
Optical metrics relating to metallic absorption in representative plasmonic systems are
surveyed, with a view to developing heuristics for optimizing performance over a range of …

Toward superlensing with metal–dielectric composites and multilayers

RB Nielsen, MD Thoreson, W Chen, A Kristensen… - Applied Physics B, 2010 - Springer
We report on the fabrication of two types of adjustable, near-field superlens designs: metal–
dielectric composites and metal–dielectric multilayer films. We fabricated a variety of films …

Excitonic superlens with copper and copper oxide

D Ziemkiewicz, K Karpiński, S Zielińska-Raczyńska - Physical Review B, 2023 - APS
We investigate the imaging properties of copper-based superlens surrounded by copper
oxide (Cu 2 O). A subwavelength image resolution of the order λ/9 is demonstrated …

An improved transfer-matrix model for optical superlenses

CP Moore, RJ Blaikie, MD Arnold - Optics Express, 2009 - opg.optica.org
The use of transfer-matrix analyses for characterizing planar optical superlensing systems is
studied here, and the simple model of the planar superlens as an isolated imaging element …

Sensitivity of imaging properties of metal-dielectric layered flat lens to fabrication inaccuracies

R Kotyński, H Baghdasaryan, T Stefaniuk… - Opto-Electronics …, 2010 - Springer
We characterize the sensitivity of imaging properties of a layered silver-TiO 2 flat lens to
fabrication inaccuracies. The lens is designed for approximately diffraction-free imaging with …

Silver superlens using antisymmetric surface plasmon modes

WJ Lee, JE Kim, H Yong Park, MH Lee - Optics Express, 2010 - opg.optica.org
Silver lenses having super-resolution are analyzed in terms of antisymmetric modes of
surface plasmon which have the ability to amplify evanescent waves in UV region …

Off-axis illumination to solve the forbidden pitch problem in plasmonic lithography

H Ding, Y Su, Y Wei - Optics & Laser Technology, 2025 - Elsevier
The state of the art for plasmonic lithography and the phenomenon of forbidden pitch are
introduced. Combined with the Optical transfer function (OTF) characteristic curve of the …

Mask 3D parameter optimization for improving imaging contrast of plasmonic lithography

J He, H Ding, Y Wei, T Ye - Applied Optics, 2024 - opg.optica.org
Based on plasmonic lithography (PL) technology, and aiming at the special nano-optical
effect of metal/dielectric multilayer composites and mask three-dimensional (M3D) effect, a …