Modelling of diamond deposition microwave cavity generated plasmas

K Hassouni, F Silva, A Gicquel - Journal of physics D: Applied …, 2010 - iopscience.iop.org
Some aspects of the numerical modelling of diamond deposition plasmas generated using
microwave cavity systems are discussed. The paper mainly focuses on those models that …

Investigation of chemical kinetics and energy transfer in a pulsed microwave H2/CH4 plasma

K Hassouni, X Duten, A Rousseau… - … Sources Science and …, 2001 - iopscience.iop.org
We present a modelling study of pulsed H 2/CH 4 microwave plasmas obtained under
moderate pressure discharge conditions in a tubular quartz reactor. The transport in the …

Raman spectroscopy study of the influence of processing conditions on the structure of polycrystalline diamond films

R Ramamurti, V Shanov, RN Singh… - Journal of Vacuum …, 2006 - pubs.aip.org
Diamond films are prepared by microwave plasma-enhanced chemical-vapor deposition on
Si (100) substrates using the H 2–Ar–CH 4 gases. Raman scattering data, including the …

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

A Rousseau, E Teboul, N Lang… - Journal of applied …, 2002 - pubs.aip.org
Langmuir probe techniques have been used to study time and spatially resolved electron
densities and electron temperatures in pulse-modulated hydrogen discharges in two …

TOBI: a two-laser beam infrared system for time-resolved plasma diagnostics of infrared active compounds

JB McManus, D Nelson, M Zahniser… - Review of scientific …, 2003 - pubs.aip.org
A compact and transportable two laser beam infrared (TOBI) system based on infrared
absorption spectroscopy has been developed for time-resolved plasma diagnostics. The …

B–C–N coatings prepared by microwave chemical vapor deposition

A Stanishevsky, H Li, A Badzian, T Badzian, W Drawl… - Thin Solid Films, 2001 - Elsevier
Ternary B–C–N amorphous and crystalline coatings were deposited by microwave chemical
vapor deposition using a mixture of NH3, CH4, B2H6 and H2 gases at substrate …

Study of polycrystalline diamond deposition by continuous and pulsed discharges

G Cicala, R Brescia, MA Nitti, A Romeo… - Surface and Coatings …, 2010 - Elsevier
The effects of pulsed microwave discharges on the deposition and properties of a set of
polycrystalline diamond films are investigated by varying the duty cycle at a fixed pulse …

Effects of pulsed microwave plasmas on diamond deposition

G Lombardi, X Duten, K Hassouni… - Journal of The …, 2003 - iopscience.iop.org
The objective of this paper was to investigate how the use of the pulsed mode affects the H
atom and radical densities in discharges obtained using a microwave cavity coupling …

Time-resolved plasma diagnostics for a better understanding of the improvement of pulsed MWPACVD of diamond

L De Poucques, J Bougdira, R Hugon… - Journal of Physics D …, 2001 - iopscience.iop.org
The deposition of diamond layers from CH 4-H 2 microwave discharge operating in pulsed
mode has been achieved. It has been shown that the variation of the time parameters of the …

Improvement of nanocrystalline diamond film growth process using pulsed Ar/H2/CH4 microwave discharges

P Bruno, F Bénédic, F Mohasseb… - Journal of Physics D …, 2004 - iopscience.iop.org
For the first time nanocrystalline diamond (NCD) films were deposited by the pulsed
microwave plasma assisted chemical vapour deposition process starting from an Ar/H 2/CH …