MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

Fusion of nanotechnology with the other science disciplines including organic chemistry,
supramolecular chemistry, and biotechnology creates a new conceptual paradigm …

Advances in electron-beam lithography (EBL) have fostered the prominent development of
functional micro/nanodevices. Nonetheless, traditional EBL is predominantly applicable to …

An ultra-fast method to directly grow metallic micro-and nano-structures is introduced. It
relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material …

Electron beam lithography uses an accelerated electron beam to fabricate patterning on an
electron-beam-sensitive resist but requires complex dry etching or lift-off processes to …

The increasing global environmental and energy crisis has urgently motivated the
advancement of sustainable materials. Significant effort has been focused on developing …

Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam
lithography, which makes 2D patterns down to a few nanometers, is one of the fundamental …

In this contribution, we compare the performance of Focused Electron Beam-induced
Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature …

Three-dimensional (3D) nanofabrication techniques are of paramount importance in
nanoscience and nanotechnology because they are prerequisites to realizing complex …

Graphene quantum dots (GQDs) have emerged as a promising type of functional material
with distinguished properties. Although tremendous effort was devoted to the preparation of …