This paper presents a comprehensive literature survey of MEMS based piezoelectric microphones along with the fabrication processes involved, application domains, and …
SH Lee, YS Kim, WH Yeo - Advanced healthcare materials, 2021 - Wiley Online Library
Acoustic stethoscopes have demonstrated beneficial factors aiding diagnosis from the doctors with accurate body sounds. Still, the conventional acoustic stethoscopes require a …
MA Shah, IA Shah, DG Lee, S Hur - Journal of sensors, 2019 - Wiley Online Library
This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and …
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones have gained significant attention due to their miniaturization, high performance, and diverse …
The integration of gas sensor components into smart phones, tablets and wrist watches will revolutionize the environmental health and safety industry by providing individuals the ability …
This paper reports the state of art in a variety of pressure and the detailed study of various matrix based pressure sensors. The performances of the bridges, buildings, etc. are …
X Huang, Y Qi, T Bu, X Li, G Liu, J Zeng, B Fan… - Nanoenergy …, 2022 - mdpi.com
In the era of the Internet of Things, various electronics play an important role in information interaction, in which the power supply is an urgent problem to be solved. Triboelectric …
Our work focuses on the design and rigorous evaluation of two novel designs for semiconducting metal oxide (SMO) gas sensors with different shapes and sizes, in order to …
M Prasad, VK Khanna - IEEE Transactions on Industrial …, 2021 - ieeexplore.ieee.org
The fabrication of piezoelectric ZnO-based micro-electro-mechanical systems (MEMS) acoustic sensor has been reported. The sensor structure consists of a piezoelectric ZnO film …