Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio

Z Deng, C Lai, J Zhou, Y Wang - Microsystem Technologies, 2023 - Springer
This paper designs and analyzes a novel RF MEMS capacitive switch with a high on/off
capacitance ratio and low pull-in voltage. Compared with general capacitive RF MEMS …

RF MEMS variable attenuators with improved dB-linearity

D Hah - Microsystem Technologies, 2023 - Springer
A variable attenuator is one of the essential components in radio frequency (RF) systems,
such as automatic gain control amplifiers and full-duplex systems. Variable attenuators …

Design and simulation of variable LC tank based on MEMS technology for multi band applications

D Razaghpour, MM Ghasemi, A Fathi - Microsystem Technologies, 2024 - Springer
A new tunable LC tank for multiband frequency applications based on micro-electro-
mechanical systems (MEMS) is presented in this paper. The designed LC tank is working in …

Design and simulation of a micro-coiled digitally-controlled variable inductor with a monolithically integrated MEMS switch

A Sharaf, SM Eladl, A Nasr, M Serry - Microsystem Technologies, 2024 - Springer
This work introduces the design, analysis, simulation, and a standard MEMS fabrication
process for a three-dimensional micro-coil with a magnetic core and a digital switch …

Parametric Optimization of RF MEMS Variable Capacitor with High Linearity for C-Band Applications

S Shaheen, P Lomax, T Arslan - 2024 IEEE 36th International …, 2024 - ieeexplore.ieee.org
A novel RF Microelectromechanical System (MEMS) Variable capacitor is proposed to
obtain a linear capacitance-voltage response and large tuning ratio. Rectangular …

Analysis of device properties of silicon nitride membrane nanoelectromechanical resonators for future optomechanical thermometry applications

H Xu - 2023 - theses.hal.science
Micro-nano-electromechanical resonators play a more and more important role in various
domains, such as sensing, high frequency communications, and even in fundamental …