High-K materials and metal gates for CMOS applications

J Robertson, RM Wallace - Materials Science and Engineering: R: Reports, 2015 - Elsevier
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …

High dielectric constant oxides

J Robertson - The European Physical Journal-Applied Physics, 2004 - cambridge.org
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin (1.4 nm) that its leakage …

XPS characterisation of in situ treated lanthanum oxide and hydroxide using tailored charge referencing and peak fitting procedures

MF Sunding, K Hadidi, S Diplas, OM Løvvik… - Journal of Electron …, 2011 - Elsevier
A technique is described for deposition of gold nanoparticles under vacuum, enabling
consistent energy referencing of X-ray photoelectron spectra obtained from lanthanum …

High dielectric constant gate oxides for metal oxide Si transistors

J Robertson - Reports on progress in Physics, 2005 - iopscience.iop.org
The scaling of complementary metal oxide semiconductor transistors has led to the silicon
dioxide layer, used as a gate dielectric, being so thin (1.4 nm) that its leakage current is too …

Band offsets of high K gate oxides on III-V semiconductors

J Robertson, B Falabretti - Journal of applied physics, 2006 - pubs.aip.org
III-V semiconductors have high mobility and will be used in field effect transistors with the
appropriate gate dielectric. The dielectrics must have band offsets over 1 eV to inhibit …

Band offsets, Schottky barrier heights, and their effects on electronic devices

J Robertson - Journal of Vacuum Science & Technology A, 2013 - pubs.aip.org
The authors review the band line-ups and band offsets between semiconductors, dielectrics,
and metals, including the theory, experimental data, and the chemical trends. Band offsets …

Interfaces and defects of high-K oxides on silicon

J Robertson - Solid-State Electronics, 2005 - Elsevier
The properties of oxides with high-dielectric constant are being extensively studied for use
as gate oxides. The criteria for choosing such oxides is discussed. The bonding at Si–oxide …

Rare-earth oxide thin films for gate dielectrics in microelectronics

M Leskelä, K Kukli, M Ritala - Journal of Alloys and Compounds, 2006 - Elsevier
Rare-earth oxides as dielectric materials may find their most important use in
microelectronics as gate oxides in transistors. This paper reviews the literature on rare-earth …

Maximizing performance for higher K gate dielectrics

J Robertson - Journal of Applied Physics, 2008 - pubs.aip.org
Further scaling of complementary metal oxide semiconductor gate stacks will require gate
dielectrics with a higher dielectric constant (K) than HfO 2⁠. We point out that this will require …

Navigation aids in the search for future high-k dielectrics: Physical and electrical trends

O Engström, B Raeissi, S Hall, O Buiu, MC Lemme… - Solid-State …, 2007 - Elsevier
From experimental literature data on metal oxides combined with theoretical estimates, we
present empirical relations for k-values and energy band offset values, that can be used in …