In the last couple of decades, solid-state device technologies, particularly electronic
semiconductor devices, have been greatly advanced and investigated for possible adoption …

This paper presents techniques used to assemble and measure micromachined
submillimeter-wave waveguide circuits operating from 500 to 750 GHz. A novel …

Micromachined packaging is emerging as the best choice for development of terahertz
multipixel heterodyne array instruments and other advanced terahertz systems. Traditional …

A silicon deep reactive-ion etching (DRIE) process has been developed, using multiple SiO
2 masks to enable multidepth waveguide features with±2% tolerance. The unique capability …

This paper presents a submillimeter-wave 500–550-GHz MEMS-reconfigurable phase
shifter, which is based on loading a micromachined rectangular waveguide with 9 E-plane …

This paper describes the design and realization of a modulated metasurface (MTS) antenna
at 300 GHz. To overcome the hurdles associated with the use of dielectric substrates in the …

This paper presents a wafer-scale silicon microfabrication technology for the sub-terahertz
(sub-THz) waveguide device mass production. Based on the effective scheme, a WR-5 (140 …

Development of dual-polarization sensitive receivers offers significant advantages for future
terahertz radiometers. The key to any such system is the orthogonal mode transducer (OMT) …

We report on the development of a waveguide-based balanced superconducting mixer for
operation near 2.7 THz. The mixer employs a pair of NbN hot-electron bolometers defined …

We explore the use of a class of metasurface (MTS), which consists of metalized cylinders
arranged in a square lattice and placed on a ground plane, for the realization of antennas at …