High-resolution detection of microwave fields on chip surfaces based on scanning microwave microscopy

T Pei, F Cheng, XD Jia, ZH Li, H Guo… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
With the development of microwave chips toward high integration, new challenges have
been posed to high-precision microwave field test techniques. In this article, we propose a …

Physics-assisted learning scheme for quantitative imaging via near-field scanning microwave microscopy

Y Zhou, N Leng, Z Wei, T Yin, M Bai… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Quantitative determination of the dielectric property is important to the analysis and
evaluation of the investigated samples' performance. This article proposes a physics …

Quantitative theory for probe-sample interaction with inhomogeneous perturbation in near-field scanning microwave microscopy

Z Wei, YT Cui, EY Ma, S Johnston… - IEEE Transactions …, 2016 - ieeexplore.ieee.org
A general approach for calculating tip-sample capacitance variation in near-field scanning
microwave microscopy is presented. It can be applied to arbitrary tip shapes, thick and thin …

Full-wave modeling of broadband near field scanning microwave microscopy

BY Wu, XQ Sheng, R Fabregas, Y Hao - Scientific reports, 2017 - nature.com
A three-dimensional finite element numerical modeling for the scanning microwave
microscopy (SMM) setup is applied to study the full-wave quantification of the local material …

Learning-based subsurface quantitative imaging via near-field scanning microwave microscopy

Y Zhou, N Leng, Z Wei, X Ye, T Yin… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Accurate characterization of sample dielectric property is essential for scientists and
engineers to analyze and evaluate the performance of the invested sample. This article …

Subsurface imaging of metal lines embedded in a dielectric with a scanning microwave microscope

L You, JJ Ahn, YS Obeng… - Journal of Physics D …, 2015 - iopscience.iop.org
We demonstrate the ability of the scanning microwave microscope (SMM) to detect
subsurface metal lines embedded in a dielectric film with sub-micrometer resolution. The …

Multi-modality strain estimation using a rapid near-field microwave imaging system for dielectric materials

X Shi, VT Rathod, S Mukherjee, L Udpa, Y Deng - Measurement, 2020 - Elsevier
Strain distribution is an important indicator of stress concentration, damage initiation and
evolution. Many dielectric materials sustain very large strain before failure. In this paper, a …

Frequency-diverse near-field sensing using multiple coupled-resonator probes

H Zhou, Q Zhang, RD Murch - IEEE Transactions on Microwave …, 2020 - ieeexplore.ieee.org
A scalable multiple-probe near-field sensing technique using coupled resonators is
presented. The technique captures perturbation information about metal scatterers near …

Influence of 2-D Transceiver Array Aperture Size and Polarization on 3-D Microwave Imaging of Subsurface Objects Under Born Approximation

K Tao, S Ma, F Han - IEEE Transactions on Microwave Theory …, 2024 - ieeexplore.ieee.org
This article utilizes the spectral analysis method to investigate the influence of 2-D
transceiver array aperture size and polarization on 3-D qualitative microwave imaging of …

2-D near-field sensing technique using single-port coupled-resonator probe arrays

H Zhou, Q Zhang, X Hou… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
This article presents a 2-D near-field sensing technique using single-port (reflection-type)
coupled-resonator probe arrays. It utilizes the frequency diversity exhibited by a single-port …