This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

Sensors, actuators and microsystems can be realized by silicon micromachining. The
structures are typically three-dimensional. To realize them, the methods known from …

The domain of micromechanical systems is an extensive, useful and yet largely unexplored
area. It is likely that, in many applications, small mechanisms will prove to be faster, more …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Capacitive micromachined ultrasonic transducer (MUT) technology is a prime candidate for
next generation imaging systems. Medical and underwater imaging and the nondestructive …

A review of micro resonant force gauges is presented. A theoretical description is given of
gauges operating in a flexural mode of vibration, including a discussion of non-linear effects …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …

Microelectromechanical system (MEMS) technology, and surface micromachining in
particular, have led to the development of miniaturized optical devices with a substantial …

It is challenging at best to find a resource that provides the breadth of information necessary
to develop a successful micro electro mechanical system (MEMS) design. Micro Electro …

After discussion of the basic aspects of CVD and its reaction kinetics LPCVD and PECVD
will evolve as techniques commonly used at high temperature and lower temperature …