The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

According to one aspect, embodiments herein provide a whole angle gyroscope comprising
a central point, at least one mass arranged symmetrically about the central point, a plurality …

The disclosure describes az-axis gyroscope where a proof mass is suspended from a
peripheral suspender and a central suspender. The peripheral suspender forms a truncated …

A vibrating body of an angular velocity detection element includes detection beams
extending in a cross shape from a central base and external connection beams and internal …

(57) ABSTRACT A ring gyroscope which comprises first and second trans versal symmetry
axes and first and second diagonal sym metry axes in the ring plane. The gyroscope further …

The invention provides a micromachined gyroscope. The micromachined gyroscope
includes a driving structure, a detection structure and a connection component. The driving …

This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof
mass quartet, a central suspension arrangement for suspending the proof mass quartet from …

The invention concerns a resonator 1 configured to be integrated into an inertial angular
sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5 …