Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory

S Rana, J Mouro, SJ Bleiker, JD Reynolds… - Nature …, 2020 - nature.com
Emerging applications such as the Internet-of-Things and more-electric aircraft require
electronics with integrated data storage that can operate in extreme temperatures with high …

Toward monolithically integrated hybrid CMOS-NEM circuits

U Sikder, K Horace-Herron, TT Yen… - … on Electron Devices, 2021 - ieeexplore.ieee.org
Nanoelectromechanical (NEM) switches offer the advantages of zero OFF-state leakage
current, abrupt switching characteristics, nonvolatile (NV) operation, and relatively low ON …

Nonvolatile nanoelectromechanical memory switches for low-power and high-speed field-programmable gate arrays

YJ Kim, WY Choi - IEEE Transactions on Electron Devices, 2014 - ieeexplore.ieee.org
The application of nanoelectromechanical (NEM) memory switches to field-programmable
gate arrays (FPGAs) has been proposed for the first time. NEM memory switches replace …

Non-Volatile Nano-Electro-Mechanical Switches and Hybrid Circuits in a 16 nm CMOS Back-End-of-Line Process

U Sikder, R Naous, V Stojanović… - IEEE Electron Device …, 2022 - ieeexplore.ieee.org
Reprogrammable non-volatile (NV) vertically-oriented nano-electro-mechanical (NEM)
switches with a compact footprint are successfully implemented using multiple back-end-of …

All metal nanoelectromechanical switch working at 300° C for rugged electronics applications

Y Qian, BW Soon, P Singh, H Campanella, C Lee - Nanoscale, 2014 - pubs.rsc.org
An all metal based electrostatic nanoelectromechanical switch has been fabricated using a
one mask process. High temperature cycling behavior is demonstrated in a vacuum …

Wafer‐Scale CMOS‐Compatible Electro‐Thermally Actuated Nanomechanical Non‐Volatile Switch with Out‐of‐Plane Electrode Configuration

YB Lee, PK Choi, MH Kang, SH Kim… - Advanced Electronic …, 2024 - Wiley Online Library
The rapid growth of data‐intensive applications has significantly heightened the concerns
about power consumption in current computing systems. From this perspective, there have …

Highly Reliable Nanoelectrothermal Non-Volatile Memory with CMOS-level Voltage and Low On-State Resistance

YB Lee, PK Choi, MH Gang, SH Kim… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
This paper reports a highly reliable nanoelectrothermal non-volatile memory (NET-NVM)
with complementary metal-oxide-semiconductor (CMOS)-level voltage and low on-state …

New Nonvolatile Static Memory Cell based on Nanoelectromechanical Device

M Choi, H Kim, Y Kim - 2021 International Conference on …, 2021 - ieeexplore.ieee.org
The application of nanoelectromechanical (NEM) memory switches to memory cell has been
proposed. This memory cell has a nonvolatile property. The memory cell can be designed by …

Active Region Formation of Nanoelectromechanical (NEM) Devices for Complementary-Metal-Oxide-Semiconductor-NEM Co-Integration

TM Cha, HC Jo, HS Kwon… - Journal of Nanoscience …, 2019 - ingentaconnect.com
Considering the isotropic release process for nanoelectromechanical (NEM) devices,
defining the specific sacrificial layer of the inter-metal-dielectric (IMD), ie, the active region …