Graphene has interesting gas sensing properties with strong responses of the graphene
resistance when exposed to gases. However, the resistance response of double-layer …

Position-sensitive detectors (PSDs) based on the lateral photo effect have been widely used
in diverse applications including optical engineering, aerospace, and military fields. With …

A stacked double-layer (SDL) thermopile-based infrared sensor, which comprised of 96
thermocouples on a suspended membrane, has been designed and fabricated with a CMOS …

In this paper, the design, fabrication, and testing of a CMOS compatible mid-infrared (mid-IR)
thermopile sensor comprising a stacked double layer thermopile and an interferometric …

A simple mass producible uncooled thermoelectric infrared microsensor has been designed
and fabricated. To improve the cost-efficiency, an advanced micromachining process, which …

We present a new type of fiber-coupled photodetector with a thermal-based optical sensor
head, which enables it to operate even in the presence of strong electro-magnetic …

In the case of clinical ventilation, sensors are needed that analyze the carbon dioxide
concentration during the exhalation cycle. For devices capable to individually control and …

Based on the analysis of infrared detection technology and Lambert-Beer law a new kind of
quad-channel non-dispersive infrared (NDIR) gas concentration analyzer is designed by …

This paper reports a novel approach for the fabrication of infrared (IR) emitters for non-
dispersive IR gas sensing. The proposed concept enables the integration of superior …

In this paper, we report the fabrication and characterization of micromachined thermoelectric
IR sensors through a self-aligned technique. Unlike most conventional front-etched …