A position sensing method for 2D scanning mirrors
B Ghazinouri, S He, TS Tai - Journal of Micromechanics and …, 2022 - iopscience.iop.org
This paper presents a cost-effective position sensing method for 2D scanning mirrors. The
method uses only one 1D PSD (position sensitive detector) located at the backside of the 2D …
method uses only one 1D PSD (position sensitive detector) located at the backside of the 2D …
Charge-based capacitive self-sensing with continuous state observation for resonant electrostatic MEMS mirrors
R Schroedter, HW Yoo, D Brunner… - Journal of …, 2021 - ieeexplore.ieee.org
This contribution presents charge-based capacitive self-sensing with a continuous full state
observer for a parametrically driven resonant electrostatic 1D MEMS mirror considering …
observer for a parametrically driven resonant electrostatic 1D MEMS mirror considering …
Capacitive charge-based self-sensing for resonant electrostatic MEMS mirrors
This paper proposes capacitive charge-based self-sensing by integration of the comb drive
intrinsic displacement current for resonant electrostatic MEMS mirrors in order to solve the …
intrinsic displacement current for resonant electrostatic MEMS mirrors in order to solve the …
Silicone oil damping for quasi-static micro scanners with electrostatic staggered vertical comb drives
R Schroedter, J Grahmann, K Janschek - IFAC-PapersOnLine, 2019 - Elsevier
Many applications like image projection, distance sensors or spectroscopy require high
speed quasi-static operating scanners with the size of several millimeters for the laser beam …
speed quasi-static operating scanners with the size of several millimeters for the laser beam …