SY Wu, CY Lin, MC Chiang, JJ Liaw… - 2013 IEEE …, 2013 - ieeexplore.ieee.org
For the first time, we present a state-of-the-art energy-efficient 16nm technology integrated
with FinFET transistors, 0.07 um 2 high density (HD) SRAM, Cu/low-k interconnect and high …