Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

A soft resistive acoustic sensor based on suspended standing nanowire membranes with point crack design

S Gong, LW Yap, Y Zhu, B Zhu, Y Wang… - Advanced Functional …, 2020 - Wiley Online Library
An artificial basilar membrane (ABM) is an acoustic transducer that mimics the mechanical
frequency selectivity of the real basilar membrane, which has the potential to revolutionize …

Development of ultrasensitive biomimetic auditory hair cells based on piezoresistive hydrogel nanocomposites

H Ahmadi, H Moradi, CJ Pastras… - … applied materials & …, 2021 - ACS Publications
With an ageing population, hearing disorders are predicted to rise considerably in the
following decades. Thus, developing a new class of artificial auditory system has been …

A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

A Yeon, HG Yeo, Y Roh, K Kim, HS Seo… - Sensors and Actuators A …, 2021 - Elsevier
Vector hydrophones based on a micro-electro-mechanical system (MEMS) hold great
promise for underwater communications, due to their potential for miniaturization and mass …

A 3D microscaffold cochlear electrode array for steroid elution

J Jang, J Kim, YC Kim, S Kim, N Chou… - Advanced …, 2019 - Wiley Online Library
In cochlear implants, the electrode insertion trauma during surgery can cause damage
residual hearing. Preserving the residual hearing is an important challenge and the …

SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

J Jang, G Panusa, G Boero, J Brugger - Microsystems & …, 2022 - nature.com
Glass-like carbon (GC) is a nongraphitizing material composed entirely of carbon atoms
produced from selected organic polymer resins by controlled pyrolysis in an inert …

Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates

N Jackson, OZ Olszewski, C O'Murchu… - Journal of Micro …, 2018 - spiedigitallibrary.org
Developing a self-sustained leadless pacemaker requires the development of an ultralow-
frequency energy harvesting system that can fit within the required dimensions. This paper …

[PDF][PDF] Biomimetic Cilia-based MEMS Sensors for Underwater Applications—A Review

B Abdul, S Abdul, AR Asary - N. Am. Acad. Res, 2021 - researchgate.net
Natural organisms such as fish, arthropods and ear have excellent sensory receptors like
later line system, filiform hairs and basilar membrane respectively. Researchers have …

Artificial cochlear sensory epithelium with functions of outer hair cells mimicked using feedback electrical stimuli

T Tsuji, A Nakayama, H Yamazaki, S Kawano - Micromachines, 2018 - mdpi.com
We report a novel vibration control technique of an artificial auditory cochlear epithelium that
mimics the function of outer hair cells in the organ of Corti. The proposed piezoelectric and …

Simultaneous measurement of the oscillation characteristics and electrical voltage output of an artificial cochlear sensory epithelium immersed in a liquid: Theory and …

T Tsuji, Y Imada, H Yamazaki, S Kawano - Sensors and Actuators A …, 2019 - Elsevier
The artificial cochlear sensory epithelium is a biomedical device that mimics the function of
the organ of Corti. The device consists of piezoelectric membranes fixed on a trapezoidal slit …