Die-level integration of metal MEMS with CMOS
AG Mukherjee, ME Kiziroglou… - 2008 2nd Electronics …, 2008 - ieeexplore.ieee.org
The integration of CMOS electronics with MEMS (micro-electro-mechanical systems) is
attractive because it allows MEMS components to be co-located with their associated control …
attractive because it allows MEMS components to be co-located with their associated control …
Integration of self-assembled inductors with CMOS LC oscillators
AG Mukherjee, S Vatti, ME Kiziroglou… - 2009 European …, 2009 - ieeexplore.ieee.org
The quality factor (Q) of integrated inductors is of great importance to radio frequency
applications. Monolithic integration of out-of-plane Au inductors with Complementary Metal …
applications. Monolithic integration of out-of-plane Au inductors with Complementary Metal …
[PDF][PDF] Fabrication of RF MEMS components on CMOS circuits
AG Mukherjee, ME Kiziroglou, S Vatti… - Proc. of …, 2008 - researchgate.net
Recently deep submicron and SiGe (silicongermanium) bipolar CMOS technologies have
enhanced the performance of Si-based radio frequency (RF) integrated circuits up to …
enhanced the performance of Si-based radio frequency (RF) integrated circuits up to …