Geometrically structured nanomaterials for nanosensors, NEMS, and nanosieves

MH Seo, JY Yoo, MS Jo, JB Yoon - Advanced Materials, 2020 - Wiley Online Library
Recently, geometrically structured nanomaterials have received great attention due to their
unique physical and chemical properties, which originate from the geometric variation in …

Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio …

R Bajwa, H Saleh, M Shojaeian, I Tekin… - Microsystems & …, 2023 - nature.com
Electrostatic microelectromechanical (MEMS) switches are the basic building blocks for
various radio-frequency (RF) transceivers. However, conventional cantilever-based designs …

High-power high-isolation RF-MEMS switches with enhanced hot-switching reliability using a shunt protection technique

Y Liu, Y Bey, X Liu - IEEE Transactions on Microwave Theory …, 2017 - ieeexplore.ieee.org
This paper presents a shunt protection technique to improve the hot-switching reliability of
metal-contact radio-frequency microelectromechanical systems (RF-MEMS) switches. The …

Extension of the hot-switching reliability of RF-MEMS switches using a series contact protection technique

Y Liu, Y Bey, X Liu - IEEE Transactions on Microwave Theory …, 2016 - ieeexplore.ieee.org
This paper presents a design methodology to drastically improve the hot-switching reliability
of contact-type radio frequency microelectromechanical system (RF-MEMS) switches. In the …

A CMOS-MEMS clamped–clamped beam displacement amplifier for resonant switch applications

JR Liu, SC Lu, CP Tsai, WC Li - Journal of Micromechanics and …, 2018 - iopscience.iop.org
This paper presents a micromechanical clamped–clamped beam (CC-beam) displacement
amplifier based on a CMOS-MEMS fabrication process platform. In particular, a 2.0 MHz …

> 1000-fold lifetime extension of a nickel electromechanical contact device via graphene

MH Seo, JH Ko, JO Lee, SD Ko, JH Mun… - … applied materials & …, 2018 - ACS Publications
Micro-/nano-electromechanical (M/NEM) switches have received significant attention as
promising switching devices for a wide range of applications such as computing, radio …

The influence of hole networks on the adsorption-induced frequency shift of a perforated nanobeam using non-local elasticity theory

H Bourouina, R Yahiaoui, R Kerid, K Ghoumid… - Journal of Physics and …, 2020 - Elsevier
Modelling the non-local frequency shift caused by the adsorption phenomenon of an adatom-
perforated nanobeam system taking into account the influence of shear distortion as well as …

Accurate absorption spectroscopy of water vapor near 1.64 µm in support of the MEthane Remote LIdar missioN (MERLIN)

S Vasilchenko, H Tran, D Mondelain, S Kassi… - Journal of Quantitative …, 2019 - Elsevier
Abstract The MERLIN mission (MEthane Remote LIdar missioN) is a space mission
dedicated to the methane atmospheric retrieval based on absorption LIDAR measurements …

A highly reliable MEMS relay with two-step spring system and heat sink insulator for high-power switching applications

YH Yoon, YH Song, SD Ko, CH Han… - Journal of …, 2015 - ieeexplore.ieee.org
This paper reports a highly reliable electrostatic microelectromechanical systems (MEMS)
relay for high-power switching applications. The main proposal to elevate reliability is to …

Characterization of a Wafer-Level Packaged Au− Ru/AlCu Contact for Micro-Switches

M Najah, S Ecoffey, T Singh… - Journal of …, 2022 - ieeexplore.ieee.org
Packaging radio-frequency microelectromechanical systems (RF-MEMS) is mandatory for
their integration in electronic systems. This paper discusses the integration of a Au− Ru/AlCu …