Electrical properties of high-κ gate dielectrics: Challenges, current issues, and possible solutions

M Houssa, L Pantisano, LÅ Ragnarsson… - Materials Science and …, 2006 - Elsevier
High-κ gate dielectrics like HfO2 and HfSiO (N) are considered for the replacement of SiO2
and SiON layers in advanced complementary metal–oxide–semiconductor (MOS) devices …

Novel integration process and performances analysis of Low STandby Power (LSTP) 3D Multi-Channel CMOSFET (MCFET) on SOI with Metal/High-K Gate stack

E Bernard, T Ernst, B Guillaumot… - 2008 Symposium on …, 2008 - ieeexplore.ieee.org
For the first time, ultra low I OFF (16.5 pA/mum) and high I ON N, P (2.27 mA/mum and 1.32
mA/mum) currents are obtained with a multi-channel CMOSFET (MCFET) architecture on …

Reliability of miniaturized transistors from the perspective of single-defects

M Waltl - Micromachines, 2020 - mdpi.com
To analyze the reliability of semiconductor transistors, changes in the performance of the
devices during operation are evaluated. A prominent effect altering the device behavior are …

MOSFET performance scaling—Part I: Historical trends

A Khakifirooz, DA Antoniadis - IEEE Transactions on Electron …, 2008 - ieeexplore.ieee.org
A simple analytical model that describes MOSFET operation in saturation from subthreshold
to strong inversion is used to derive a new formulation of the intrinsic switching delay of the …

Unexpected mobility degradation for very short devices: A new challenge for CMOS scaling

A Cros, K Romanjek, D Fleury… - 2006 International …, 2006 - ieeexplore.ieee.org
A new mobility degradation specific to short channel MOSFETs is studied and elucidated.
Pocket implants/dopants pile-up, interface states/oxide charges, remote Coulomb scattering …

Reliable high-voltage drain-extended FinFET with thermoelectric improvement

KY Kim, YS Song, G Kim, S Kim… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, a reliable drain-extended (De) fin-shaped field-effect transistor (DeFinFET)
with improved thermal performance and electrical performance is proposed for high-voltage …

Front and back channels coupling and transport on 28 nm FD-SOI MOSFETs down to liquid-He temperature

BC Paz, M Cassé, S Haendler, A Juge, E Vincent… - Solid-State …, 2021 - Elsevier
Abstract 28 nm FD-SOI technology is electrically characterized aiming at cryogenic
applications. Electrostatics and transport are evaluated and compared while lowering …

FinFET analogue characterization from DC to 110 GHz

D Lederer, V Kilchytska, T Rudenko, N Collaert… - Solid-State …, 2005 - Elsevier
In this work the analogue performance of 50nm gate length FinFETs is investigated under
static and dynamic conditions up to 110GHz. The fin width is shown to have a large impact …

Novel 3D integration process for highly scalable Nano-Beam stacked-channels GAA (NBG) FinFETs with HfO2/TiN gate stack

T Ernst, C Dupre, C Isheden, E Bernard… - 2006 International …, 2006 - ieeexplore.ieee.org
Three-and four-level matrices of 15 times 70 nm Si Nano-Beams have been integrated with
a novel CMOS gate-all-around process (GAA) down to 80 nm gate length. Thanks to this 3D …

[图书][B] Nano-CMOS gate dielectric engineering

H Wong - 2011 - books.google.com
According to Moore's Law, not only does the number of transistors in an integrated circuit
double every two years, but transistor size also decreases at a predictable rate. At the rate …